中古 AMAT / APPLIED MATERIALS xR80 Leap II #9174553 を販売中

Ion implanter, 8" Processor module Beam line module Source services module Processor rack Heat exchanger / PDU Mobile PC and desk Monitor Control module (VME) Signal tower TEM Probe Mains matching TX No VESDA smoke detector No ISO TX Beamline, controller PSU and assembly: Pre accelerator / Mag controller Vacuum controller Post A controller Turbo controllers Focus PSU A-Mag PSU Pre A converter PSU Source mag PSU Suppression PSU No Decel PSU Beam path components, source / Extraction / Flight tube / MRS and PFS assy: Source head type: IHC Extraction type: Dual bellows Flight tube MRS Pre defining PFS Type: STD PFS Gas cabinet (Source services): Module: SDS / HP GeF4: HP BF3: HP (2) Modules: SDS Purge module PSU, Controllers and assembly: Gas and temperature controller Filament PSU: XANTREX Arc PSU Bias PSU DPS Pre A HV stack Source ISO TX Vacuum system: LEYBOLD 1000C Source turbo pump LEYBOLD 361C MRS Turbo pump TURBOTRONIK NT20 Turbo pump controller EDWARDS QDP40 Beam line dry pump CTI CTI-10 Side cryo pump CTI CTI-10 Rear cryo pump Processor PSU controller and assy: Wheel and components Spin motor Gripper Transfer arm Clip actuator Blade A/B Sensor Tilt assembly: 0-10 PFS DP Box Beam stop Beam profiler Filament PSU (PFS) Wafer loader / Mini environment assembly: Carousel Indexer W/L Door Orientor: Notch (3) Cassettes / Trays XR80 Arm servo PSU XR80 Arm servo controller Control rack: DAQPDU Target system W/L Controller W/L Vacuum Ground PDU Target system vacuum Spin / Scan controller Direct drive interface Plasma flood chassis Scan amplifier Spin amplifier Spin / Scan PDU Bleed resistor MOTECH 80 VME: PMAC Vac / Atoms CPU Main board Loop controller Energy level: 2-80 keV 1997 vintage.