中古 LAM RESEARCH (4) Chambers for Alliance 4 9600 SE #293594496 を販売中

ID: 293594496
ウェーハサイズ: 8"
ヴィンテージ: 1996
8" Process chamber: Chamber A/B: Metal etch chambers Chamber C/D: Strip chambers BROOKS VCE: Loader / Transport system Primary function: Metal etch and asher Computer interface 8-Lines gas box (2) NOAH PRECISION 3300 Chillers With Controller (2) Cassette load / Unload platens Remote operator station Remote gas box assembly Remote power distribution box Operating system: Next 3.3 Gases: Boron Tri-chloride Chlorine Sulfur Hexafluoride Oxygen Nitrogen Argon Missing parts: VCE Boards VME Boards Wafer aligner TM Robot CE Marked Power supply: 208 Volts, 50 Hz, Single phase 1996 vintage.
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